The constant demand for continuing RF module and thus bulk acoustic wave (BAW) filter size reduction results in the need of accurate design characterization strategies to comply with ever more stringent linear and non-linear product specification requirements. While the target performance of a design is very precisely predicted by simulation, wafer level testing of BAW filters is required to screen for outlier parts in production. Therefore, especially the characterization of the second harmonic (H2) performance of BAW filters on-wafer poses a challenge. Typical on-wafer filter probing techniques are not representative of a filter’s H2 response in a final module. Also, the time intensive nature of H2 characterization limits the resolution of measurement data across the wafer. In this work, we discuss an advanced probing technique to overcome the challenges of accurate inline characterization of BAW filter H2 performance. In addition, we compare the advantages and limitations of two H2 test setup variants. Finally, an example is given to demonstrate how the proposed probing technique can be used to down select different BAW filter designs during the product development phase.